QUANTITATIVE SCANNING ELECTRON MICROSCOPY OF SURFACES

L. Reimer

The emissive modes of secondary and backscattered electrons in a scanning electron microscope work more quantitavely for material and topographic contrasts and can better separate different types of contrast when using a multi-detector system.

Domaines: Articles anciens

L. Reimer. QUANTITATIVE SCANNING ELECTRON MICROSCOPY OF SURFACES. Journal de Physique Colloques, 1984, 45 (C2), pp.C2-291-C2-296. ⟨10.1051/jphyscol:1984265⟩. ⟨jpa-00223979⟩