Electron cyclotron resonance ion source for high currents of mono- and multicharged ion and general purpose unlimited lifetime application on implantation devices

C. Bieth , J.L. Bouly (1) , J.C. Curdy (1) , S. Kantas , P. Sortais (1) , P. Sole (1) , J.L. Vieux-Rochaz (1)

1 LPSC - Laboratoire de Physique Subatomique et de Cosmologie

Domaines: Instrumentations et Détecteurs [physics.ins-det]

C. Bieth, J.L. Bouly, J.C. Curdy, S. Kantas, P. Sortais, et al.. Electron cyclotron resonance ion source for high currents of mono- and multicharged ion and general purpose unlimited lifetime application on implantation devices. International Conference on Ion sources 8, 1999, Kyoto, Japan. pp.899-901. ⟨in2p3-00004033⟩