Checkerboard-like structure in columnar W-Mo thin films
Résumé
Implementing bottom-up approaches to control the columnar
architecture of thin films at the nanoscale is a powerful tool for
developing surface properties. While inclined columns, zigzags or
helices made of a single material are now commonly produced by
oblique angle deposition processes, the creation of more complex
and original structures associating at least two different
materials still remains a challenging task, even more on silicon
substrate. Herein, we show how to prepare tungsten/molybdenum
columns exhibiting a checkerboard-like structure with motifs of a
few tens of nanometers. Although understanding the growth phenomena
becomes more problematic when two components are simultaneously
provided during the film fabrication, this original combination of
controlled mosaics in columnar thin films enables new opportunities
to produce some unusual nanostructures for functional
materials.
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