Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet

Jennifer Rebellato (1, 2) , Regina Soufli (2) , Evgueni Meltchakov (1) , Eric M Gullikson (3) , Sébastien de Rossi (1) , Cédric Baumier (4) , Florian Pallier (4) , Franck Delmotte (1)

1 Laboratoire Charles Fabry / Optique XUV
2 CNES - Centre National d'Études Spatiales [Toulouse]
3 LBNL - Lawrence Berkeley National Laboratory [Berkeley]
4 IJCLab - Laboratoire de Physique des 2 Infinis Irène Joliot-Curie

presents the structural characterization of Al/Sc-based periodic multilayer coatings for the extreme ultraviolet (EUV) spectral range. Based on transmission electron microscopy and electron diffraction as well as grazing-incidence and large-angle x-ray diffraction, a model for the layer structure and the interfacial effects of Al/Sc coatings is built. The onset of crystallization in nanoscale Al and Sc layers as a function of thickness is also revealed in these characterizations. The Al/Sc layer model is validated and further refined by fitting in-band and out-of-band EUV reflectance measurements across 5 orders of magnitude in an extended wavelength range from 17 to 80 nm. The same type of EUV reflectance measurements is used to test the Al/Sc aging properties and to demonstrate the spectral response of optimized two-and tri-material multilayers

Mots clés: Multilayer Aluminum Scandium Extreme ultraviolet Microstructure Synchrotron characterization; Multilayer Aluminum Scandium Extreme ultraviolet Microstructure Synchrotron characterization

Domaines: Physique [physics]

Jennifer Rebellato, Regina Soufli, Evgueni Meltchakov, Eric M Gullikson, Sébastien de Rossi, et al.. Optical, structural and aging properties of Al/Sc-based multilayers for the extreme ultraviolet. Thin Solid Films, 2021, 735, ⟨10.1016/j.tsf.2021.138873⟩. ⟨hal-03970038⟩