Microfabricated alkali vapor cells using local sealing

Vincent Maurice (1, 2) , Ravinder Kumar Chutani (1) , Clément Carlé (3) , Shervin Keshavarzi (3) , Samuel Queste (3) , Ludovic Gauthier-Manuel (3) , Jean-Marc Cote (3) , Rémy Vicarini (3) , Rodolphe Boudot (3) , Nicolas Passilly (3)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 AIMAN-FILMS - IEMN - Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN
3 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

We report on a new technique to form and seal micro-fabricated cells. The technique consists in integrating single-use sealing structures actuated through laser irradiation, either to isolate cavities from each other or to connect them. Inspired by the glass-blowing techniques, we demonstrate “make-seals” and “break-seals” cells. This technique opens new

Domaines: Optique [physics.optics]; Acoustique [physics.class-ph]; Matériaux; Micro et nanotechnologies/Microélectronique; Autre

Vincent Maurice, Ravinder Kumar Chutani, Clément Carlé, Shervin Keshavarzi, Samuel Queste, et al.. Microfabricated alkali vapor cells using local sealing. INMAQS Technical Workshop, Sep 2022, Talk, United Kingdom. ⟨hal-03818572⟩