TRL-calibration Standards with Emphasis on Crosstalk Reduction

Marco Cabbia (1) , Sebastien Fregonese (1) , Chandan Yadav , Thomas Zimmer (1)

1 IMS - Laboratoire de l'intégration, du matériau au système

We present an innovative "shifted RF Pad" TRL on-wafer calibration kit to minimize the impact of crosstalk. The impact of the crosstalk in on-wafer measurement up to 330 GHz is observable by comparing results of DUTs obtained using the shifted and conventional RF pad calibration kit during calibration. Use of shifted RF pad structures shows improvement in measured DUT characteristics owing to reduced crosstalk. In addition, simulation results obtained using EM simulator, TCAD and SPICE models are employed to analyze the on-wafer measurement of DUTs.

Mots clés: S-paramater measurement; Semiconductor Devices; HBT; Sub-THz frequency; THz frequency; on-wafer TRL calibration; calibration kit structures design

Domaines: Sciences de l'ingénieur [physics]

Marco Cabbia, Sebastien Fregonese, Chandan Yadav, Thomas Zimmer. TRL-calibration Standards with Emphasis on Crosstalk Reduction. 2022 14th Global Symposium on Millimeter-Waves & Terahertz (GSMM), May 2022, Seoul, South Korea. pp.207-209, ⟨10.1109/GSMM53818.2022.9792326⟩. ⟨hal-03776360⟩