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Article Dans Une Revue Optics Express Année : 2022

Immediate and one-point roughness measurements using spectrally shaped light

Résumé

Capitalizing on a previous theoretical paper, we propose a novel approach different from the usual scattering measurements, one that is free of any mechanical movement or scanning. Scattering is measured along a single direction. Wide-band illumination with a properly chosen wavelength spectrum makes the signal proportional to the sample roughness, or to the higher-order roughness moments. Spectral shaping is carried out with gratings and a spatial light modulator. We validate the technique by crosschecking with a classical angle-resolved scattering set-up. Though the bandwidth is reduced, this white light technique may be of key interest for on-line measurements, large components that cannot be displaced, or other parts that do not allow mechanical movement around them.

Dates et versions

hal-03656323 , version 1 (02-05-2022)

Identifiants

Citer

Xavier Buet, Myriam Zerrad, Michel Lequime, Gabriel Soriano, Jean-Jacques Godeme, et al.. Immediate and one-point roughness measurements using spectrally shaped light. Optics Express, 2022, 30 (10), pp.16078-16093. ⟨10.1364/OE.450790⟩. ⟨hal-03656323⟩
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