Study on Young's modulus of thin films on Kapton by microtensile testing combined with dual DIC system

Wei He (1) , Philippe Goudeau (1) , Eric Le Bourhis (1) , Pierre-Olivier Renault (1) , Jean Christophe Dupré (1) , Pascal Doumalin (1) , Shibin Wang (2)

1 PPrime [Poitiers] - Institut Pprime [UPR 3346]
2 Department of Mechanics, Tianjin University, Tianjin 300072, China

In this paper, a method is proposed to determine the in-plane elastic modulus of thin films. Thanks to our custom-designed dual digital image correlation (DIC) system, it is possible to measure the time-resolved strain of film and substrate simultaneously during the microtensile testing. The macroscopic strain difference between coated and uncoated section allows extracting the elastic constants of thin films with high precision. In the case of 400 nm tungsten films coated on each side of one substrate over half of the gauge length, the value obtained agrees well with the bulk one. Furthermore, finite element method (FEM) has been performed to simulate the mechanical behavior of the specimen. High consistency with theoretical and experimental results is verified.

Mots clés: Nanostructured thin films; Microtensile testing; Dual DIC system; Elastic modulus

Domaines: Sciences de l'ingénieur [physics]

Wei He, Philippe Goudeau, Eric Le Bourhis, Pierre-Olivier Renault, Jean Christophe Dupré, et al.. Study on Young's modulus of thin films on Kapton by microtensile testing combined with dual DIC system. Surface and Coatings Technology, 2016, 308, pp.273-279. ⟨10.1016/j.surfcoat.2016.07.114⟩. ⟨hal-03636710⟩