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Communication Dans Un Congrès Année : 2022

Advances in optical diagnostics of Microplasmas: imaging and spectroscopy

Résumé

Microplasmas are a sizable part of non-equilibrium non-thermal plasma sources. The latter have been intensively developed since the mid-nineties and revealed their unique properties to yield a rich reactive chemistry at elevated pressure up to atmospheric pressure [1]. By definition, microplasma reactors have –at least– one of their dimension in bellow the millimeter scale. Micro-hollow cathode discharges (MHCD) are well-known example of miniaturized reactor of hundreds micrometers which can operate at atmospheric pressure in DC or AC[2]. Widely studied to support many kind of applications related to environment purposes, microplasmas are still being challenging to study experimentally due to their characteristic dimensions [1]. Indeed, to better understand the elementary processes of the discharge as well as to control the reactive kinetic chemistry involved in the targeted plasma processes, experimental diagnostics are mandatory. Apart from a thorough analysis of the electrical circuit which can already bring substantial information, optical diagnostics techniques are commonly used to measure some plasma parameters. Due to the limited access, the investigations are often delicate and require more efforts to carry out proper measurements. In this contribution one will present several recent approaches used to determine key parameters of the discharge such as the gas temperature, the electron number density, metastables densities or the hydrodynamic forces[3,4]. The focus will be put on the capability to performed space resolved measurements and to reveal the gradients in two different microplasma reactor systems. Comparison with some modeling results published in the literature will be discussed. This presentation will be also an opportunity to discuss further outlook and opportunities to extend already existing diagnostic methods to micrometer scale plasma sources. [1] Bruggeman P and Brandenburg R 2013 J. Phys. Appl. Phys. 46 464001–464001 [2] Eden J G, Park S-J, Cho J H, et al 2013 IEEE Trans. Plasma Sci. 41 661–75 [3] Iseni S, Michaud R, Lefaucheux P, Sretenović G B, Schulz-von der Gathen V and Dussart R 2019 Plasma Sources Sci. Technol. 28 065003 [4] Iseni S, Pichard C and Khacef A 2019 Appl. Phys. Lett. 115 034102
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Dates et versions

hal-03633854 , version 1 (07-04-2022)

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  • HAL Id : hal-03633854 , version 1

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Sylvain Iséni, Nelly Bonifaci, Ahmed Khacef, Volker Schulz-von Der Gathen, Goran Sretenović, et al.. Advances in optical diagnostics of Microplasmas: imaging and spectroscopy. International Workshop on Microplasmas (IWM 11), Jun 2022, Raleigh, United States. ⟨hal-03633854⟩
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