Fabrication and functional characterization of ZnO nanowire based piezoelectric nanogenerators

François Morini (1) , Abhishek Singh Dahiya (1) , Sarah Boubenia (1) , Charles Opoku (1) , Guylaine Poulin-Vittrant (1) , F. Cayrel (1) , Daniel Alquier (1)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

The present work describes the seedless approach for the growth of ZnO nanowires (NWs) on flexible polyethylene terephthalate (PET) substrates and fabrication of fully flexible ZnO NW based piezoelectric nanogenerators (NGs). The x-ray diffraction (XRD) and high resolution transmission electron microscopy (HRTEM) confirms the high quality of grown nanomaterial. The performance of the fabricated ZnO NW based NG device is measured under a force of 5N at a frequency of 3Hz. A peak output voltage of ~ 950mV is obtained that corresponds to a power density of ~ 1µW/cm 2. Our results clearly demonstrate the interest of ZnO NWs for the development of autonomous micro-nano systems (MNSs).

Domaines: Micro et nanotechnologies/Microélectronique; Energie électrique

François Morini, Abhishek Singh Dahiya, Sarah Boubenia, Charles Opoku, Guylaine Poulin-Vittrant, et al.. Fabrication and functional characterization of ZnO nanowire based piezoelectric nanogenerators. 13th Expert Evaluation and Control of Compound Semiconductor Materials and Technologies (EXMATEC), Jun 2016, Aveiro, Portugal. ⟨hal-03591413⟩