Local probing of the electrical properties of thin dielectric films: application to silver nanoparticles-based nanocomposite
Résumé
Nanodielectric materials (thin films, nanocomposites…), which are nowadays involved in many applications in the micro/nano-electronic domain [1], raise new paradigms and challenges related to modifications of their properties due to their nanoscale dimensions and to the presence of a large amount of interfaces. To improve system performance and reliability, the functional properties of thin dielectric layers need to be characterized at nanoscale. Techniques derived from Atomic Force Microscopy (AFM) appear suitable candidates, due to their nanoscale spatial resolution.