Multiobjective scheduling for semiconductor manufacturing plants

Oscar Baez Senties (1) , Catherine Azzaro-Pantel (1) , Luc Pibouleau (1) , Serge Domenech (1)

1 LGC - Laboratoire de Génie Chimique

Scheduling of semiconductor wafer manufacturing system is identified as a complex problem, involving multiple and conflicting objectives (minimization of facility average utilization, minimization of waiting time and storage, for instance) to simultaneously satisfy. In this study, we propose an efficient approach based on an artificial neural network technique embedded into a multiobjective genetic algorithm for multi-decision scheduling problems in a semiconductor wafer fabrication environment.

Mots clés: Discrete event simulation; Artificial neural networks; Multiobjective genetic algorithm; Semiconductor manufacturing

Domaines: Génie chimique; Génie des procédés

Oscar Baez Senties, Catherine Azzaro-Pantel, Luc Pibouleau, Serge Domenech. Multiobjective scheduling for semiconductor manufacturing plants. Computers & Chemical Engineering, 2010, vol. 34 (n° 4), pp. 555-566. ⟨10.1016/j.compchemeng.2010.01.010⟩. ⟨hal-03549594⟩