On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching

Jinying Zhang (1) , Wei-Jiang Xu (2, 3) , Xianmei Wu (4)

1 BIT - Beijing Institute of Technology
2 TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN
3 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 UCAS - University of Chinese Academy of Sciences [Beijing]

Microelectromechanical system (MEMS) is an interdisciplinary research and education field. The multiphysics simulation can make the abstract theory on MEMS design concrete and improve the learning efficiency. A MEMS course design is presented in this paper. The content consists of fundamental theory on MEMS design and hands-on simulation experiments. The essence of multiphysics coupling is revealed. Simulation cases are displayed. Teaching approaches are applied in the course design including hands-on simulation experiments, from an easy task to the difficult one and integration of simulation cases and theory lectures. The course design has guiding significance for other science and engineering curriculum design.

Mots clés: multiphysics simulation; hands-on experiment; MEMS theory; visualization; multiphysics simulation; multiphysics simulation; multiphysics simulation

Domaines: Sciences de l'ingénieur [physics]

Jinying Zhang, Wei-Jiang Xu, Xianmei Wu. On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching. 2021 IEEE International Conference on Engineering, Technology & Education (TALE), Dec 2021, Wuhan, China. pp.769-773, ⟨10.1109/TALE52509.2021.9678780⟩. ⟨hal-03548801⟩