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Conference papers

Vibrational response of a piezoelectric MEMS resonator disc metallized with alternating electrical source

Ismail Naciri Abdessamad Rguiti Youssef Belkassmi Lahoucine Elmaimouni Jean-Etienne Lefebvre 1, 2 Faniry Ratolojanahary Salahddine Krit Tadeusz Gryba 1, 2
1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
Abstract : This paper presents a study of vibrational behavior of a piezoelectric MEMS resonator disc partially metalized with electrical source in case of partial centralized metallization using Legendre polynomial method. Such method is based on solving coupled governing equations of motion and characteristic equations of piezoelectricity. The Formulation is simple to implement and consist of decomposing the mechanical and electrical displacement fields in a double series of Legendre polynomial basis. With a single calculation, the method is able to restitute the electro-optic behavior of the MEMS resonators including resonance and anti resonance frequencies, electrical admittance, dispersion profiles and electromechanical coefficient for all mode orders.
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Conference papers
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Submitted on : Thursday, December 23, 2021 - 4:56:37 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

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IEMN | UNIV-VALENCIENNES | UNIV-LILLE | CNRS

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Ismail Naciri, Abdessamad Rguiti, Youssef Belkassmi, Lahoucine Elmaimouni, Jean-Etienne Lefebvre, et al.. Vibrational response of a piezoelectric MEMS resonator disc metallized with alternating electrical source. 4th International Conference on Engineering and MIS 2018, ICEMIS 2018, Session 6 - Applied Engineering and Energy, Jun 2018, Istanbul, Turkey. pp.1-6, ⟨10.1145/3234698.3234767⟩. ⟨hal-03501766⟩

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