[Invited] H2S photoacoustic detection with an integrated THz gas sensor for food quality control

Elias Akiki (1) , Marie-Hélène Mammez (2) , Guillaume Ducournau (1, 3) , Benjamin Walter (4) , Gaël Mouret (2) , Jean-Francois Lampin (1, 3) , Mathias Vanwolleghem (1, 3)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 LPCA - Laboratoire de Physico-Chimie de l'Atmosphère
3 PHOTONIQUE THZ - IEMN - Photonique THz - IEMN
4 Vmicro SAS

THz photoacoustic (PA) detection of H 2 S gas concentrations on the order of 200 ppm using a Poly-Si membrane as a PA microphone is reported. This result is a first step towards the demonstration of a fully integrated THz PA gas sensor with an expected sensitivity of 10’s of ppb.

Mots clés: membranes; microphones; photodetectors; silicon; submillimetre wave detectors; submillimetre wave measurement; terahertz wave detectors; chemical variables measurement; elemental semiconductors; food technology; gas sensors; hydrogen compounds

Domaines: Optique / photonique; Micro et nanotechnologies/Microélectronique; Electronique

Elias Akiki, Marie-Hélène Mammez, Guillaume Ducournau, Benjamin Walter, Gaël Mouret, et al.. [Invited] H2S photoacoustic detection with an integrated THz gas sensor for food quality control: [Invited]. 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), Aug 2021, Chengdu, China. pp.1-2, ⟨10.1109/IRMMW-THz50926.2021.9567307⟩. ⟨hal-03465148⟩