Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation

Zhen Zheng , Junyang An , Ruiling Gong , Yuheng Zeng , Jichun Ye , Linwei Yu , Ileana Florea , Pere Roca I Cabarrocas (1) , Wanghua Chen

1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]

Mots clés: Kelvin probe force microscopy; c-Si passivation; surface potential; AlO x; SiO x

Domaines: Biotechnologie

Zhen Zheng, Junyang An, Ruiling Gong, Yuheng Zeng, Jichun Ye, et al.. Coupled Investigation of Contact Potential and Microstructure Evolution of Ultra-Thin AlOx for Crystalline Si Passivation. Nanomaterials, 2021, 11 (7), pp.1803. ⟨10.3390/nano11071803⟩. ⟨hal-03447656⟩