Influence of Lanthanum Oxycarbonate Deposition on Carbon Dioxide Detection

Fabien Le Pennec (1) , Ludovic Le Roy (1) , Carine Perrin-Pellegrino (1) , Marc Bendahan (1) , Sandrine Bernardini (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

This work aims to compare two deposition methods to highlight the strong influence of the induced morphology on the sensitive film conductivity. Lanthanum oxycarbonate films have been deposited by drop coating and screen printing for carbon dioxide detection. The measurements are based on a change in resistance and provide sensitive responses to carbon dioxide concentrations in a humid environment maintained at 50%. Electrical measurements were made under 5 000 ppm of carbon dioxide in synthetic air. Our results highlighted the close link between the morphology of the sensitive layers and the electrical responses of the sensors, and therefore the need to master the deposition technique.

Mots clés: Gas sensor; CO2; La2O3; Rare earth oxide; Environment

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux

Fabien Le Pennec, Ludovic Le Roy, Carine Perrin-Pellegrino, Marc Bendahan, Sandrine Bernardini. Influence of Lanthanum Oxycarbonate Deposition on Carbon Dioxide Detection. IEEE Sensors 2021, Oct 2021, Sydney, Australia. ⟨hal-03428734⟩