Internal structuring of silicon with multi-timescale irradiations

Amlan Das (1) , Andong Wang (1) , Olivier Utéza (1) , David Grojo (1)

1 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.

Domaines: Physique [physics]; Sciences de l'ingénieur [physics]

Amlan Das, Andong Wang, Olivier Utéza, David Grojo. Internal structuring of silicon with multi-timescale irradiations. CLEO: Science and Innovations, 2021, San Jose, United States. pp.SM3B.6, ⟨10.1364/CLEO_SI.2021.SM3B.6⟩. ⟨hal-03383865⟩