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Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors

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https://hal.archives-ouvertes.fr/hal-03377046
Contributor : Antoine Frappé Connect in order to contact the contributor
Submitted on : Wednesday, October 13, 2021 - 10:22:28 PM
Last modification on : Saturday, December 18, 2021 - 3:10:25 AM

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N. Sakamoto, Antoine Frappé, Bruno Stefanelli, Andreas Kaiser, Y. Mita. Wireless drive of a MEMS ciliary motion actuator via coupled magnetic resonances using micro inductors. TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.1961-1964, ⟨10.1109/TRANSDUCERS.2015.7181337⟩. ⟨hal-03377046⟩

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