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Communication Dans Un Congrès Année : 2021

Pulsed aerosol assisted deposition of pp-HMDSO thin film in a Dielectric Barrier Discharge

Résumé

Aerosol-assisted plasmas can be used to produce a wide variety of thin films, including homogeneous, nanotextured and/or nanocomposite coatings. For example, the nebulization of colloidal solutions, i.e. liquid solutions containing nanoparticles, in plane-to-plane dielectric barrier discharge (DBD) at atmospheric pressure has been used for nanocomposite thin film deposition [1]. However, nanoparticles-loaded droplets in the aerosol lead to the deposition of aggregated nanoparticles embedded in the matrix [1]. Recently, a new process of nanoparticles injection in plasmas has been developed [2]. This method consists in synthesizing the nanoparticles prior to their injection in the plasma in a pulsed injection regime. However, the composition of the aerosol as well as the impact of the pulsed injection on the DBD are still opening questions. This work aims to study a pulsed-aerosol-assisted DBD deposition process. In contrast with the continuous nebulization of solutions, pulsed injection causes a sudden increase of the quantity of precursor in the inter-electrode space as droplets – their velocity being in the 10 m.s-1 range. We observed that depending on the process parameters (injection, time, pulse frequency, continuous gas flow rate, etc.), the discharge stability and, consequently, the thin film deposition (here ppHMDSO or amorphous carbon) are modified. It is shown that this pulsed injection of either HMDSO or pentane plays a very critical role on the formation of plasma-polymerized coatings.
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Dates et versions

hal-03374432 , version 1 (14-10-2021)

Identifiants

  • HAL Id : hal-03374432 , version 1

Citer

L Cacot, E Loranger, Guillaume Carnide, M L Kahn, Richard Clergereaux, et al.. Pulsed aerosol assisted deposition of pp-HMDSO thin film in a Dielectric Barrier Discharge. E-MRS Spring meeting 2021, May 2021, virtual, France. ⟨hal-03374432⟩
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