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Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications

M-T Bakouche 1 S Ganesan 2 D. Guérin 1, 3 D. Hourlier-Bahloul 1, 4 M Bouazaoui 5 J.P. Vilcot 1, 6 S. Maricot 1, 6
3 CMNF-IEMN - Centrale de Micro Nano Fabrication - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 EPIPHY - IEMN - EPItaxie et PHYsique des hétérostructures - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
6 OPTO - IEMN - Optoélectronique - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : In this paper, we describe a novel fabrication method of a microfluidic integrated surface plasmon resonance (SPR) gold chip based on a (3-mercaptopropyl) trimethoxy silane (MPTMS) self-assembled monolayer. This monolayer was formed at the surface of a microfluidic chip made of polydimethylsiloxane (PDMS). Its presence was confirmed by contact angle and Fourier transform infrared spectroscopy measurements on the modified PDMS surface. A basic, but nevertheless appropriate, 4-channel microfluidic system was made on PDMS and reported on a gold SPR sensor. Sealing tests were carried-out by injecting continuous flows of solutions under gradient pressure up to 1.8 bar. Bonding strength of chemical and corona binding were measured and compared. The test of the integrated microfluidic SPR sensor on an SPR bench validated its functionality and proved as well that no leakage is observed between the different microfluidic channels.
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https://hal.archives-ouvertes.fr/hal-03373493
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Submitted on : Monday, October 11, 2021 - 3:10:10 PM
Last modification on : Tuesday, January 18, 2022 - 4:16:04 PM
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M-T Bakouche, S Ganesan, D. Guérin, D. Hourlier-Bahloul, M Bouazaoui, et al.. Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications. Journal of Micromechanics and Microengineering, IOP Publishing, 2020, 30 (12), pp.125003. ⟨10.1088/1361-6439/abb991⟩. ⟨hal-03373493⟩

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