Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications

M-T Bakouche (1) , S Ganesan (2) , David Guérin (1, 3) , D. Hourlier-Bahloul (1, 4) , M Bouazaoui (5) , Jean-Pierre Vilcot (1, 6) , Sophie Maricot (1, 6)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 Karolinska Institutet [Stockholm]
3 CMNF - IEMN - Centrale de Micro Nano Fabrication - IEMN
4 EPIPHY - IEMN - EPItaxie et PHYsique des hétérostructures - IEMN
5 PhLAM - Laboratoire de Physique des Lasers, Atomes et Molécules - UMR 8523
6 OPTO - IEMN - Optoélectronique - IEMN

In this paper, we describe a novel fabrication method of a microfluidic integrated surface plasmon resonance (SPR) gold chip based on a (3-mercaptopropyl) trimethoxy silane (MPTMS) self-assembled monolayer. This monolayer was formed at the surface of a microfluidic chip made of polydimethylsiloxane (PDMS). Its presence was confirmed by contact angle and Fourier transform infrared spectroscopy measurements on the modified PDMS surface. A basic, but nevertheless appropriate, 4-channel microfluidic system was made on PDMS and reported on a gold SPR sensor. Sealing tests were carried-out by injecting continuous flows of solutions under gradient pressure up to 1.8 bar. Bonding strength of chemical and corona binding were measured and compared. The test of the integrated microfluidic SPR sensor on an SPR bench validated its functionality and proved as well that no leakage is observed between the different microfluidic channels.

Mots clés: PDMS-gold bonding; surface functionalization; MPTMS; silanes; surface plasmon resonance; microfluidic-chip; tensile strength

Domaines: Chimie; Sciences de l'ingénieur [physics]

M-T Bakouche, S Ganesan, David Guérin, D. Hourlier-Bahloul, M Bouazaoui, et al.. Leak-free integrated microfluidic channel fabrication for surface plasmon resonance applications. Journal of Micromechanics and Microengineering, 2020, 30 (12), pp.125003. ⟨10.1088/1361-6439/abb991⟩. ⟨hal-03373493⟩