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Article Dans Une Revue Vacuum Année : 2018

Evolution of the structural, morphological, optical and electrical properties of reactively RF-sputtered cobalt oxide thin films with oxygen pressure

Résumé

Cobalt oxide thin films were deposited on glass and silicon substrates using reactive cathodic radio-frequency sputtering from a pure cobalt target in oxygen/argon gas mixtures with different percentages of oxygen (10, 30, 40 and 50 %). The X-ray diffractograms showed that deposited thin films crystallized in a cubic Co 3 O 4 phase. The crystallite size was found to vary with the oxygen pressure, reaching a maximum using 40 % of O 2. Scanning electron microscopy (SEM), AFM, energy dispersive X-ray spectroscopy and Raman scattering analyses confirmed the formation of Co 3 O 4 films with nano-sized particles. In addition, it is found that the optical band gap of the films increased with increasing oxygen pressure in the sputtering atmosphere. Finally, the electrical resistivity of the sputtered thin films was shown to increase with oxygen-percentage.
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Dates et versions

hal-03372937 , version 1 (11-10-2021)

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H El Aakib, Jean-François Pierson, M Chaik, C Samba Vall, H Ait Dads, et al.. Evolution of the structural, morphological, optical and electrical properties of reactively RF-sputtered cobalt oxide thin films with oxygen pressure. Vacuum, 2018, ⟨10.1016/j.vacuum.2018.10.065⟩. ⟨hal-03372937⟩
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