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Polydimethylsiloxane micro-channels application for the study of dynamic wetting of nano-etched silicon surfaces based on acoustic characterization method
Abstract : Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of Deep Trench Isolation (DTI) structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PolyDiMethylSiloxane (PDMS) micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.
https://hal.archives-ouvertes.fr/hal-03362264
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Submitted on : Monday, October 4, 2021 - 3:50:05 PM
Last modification on : Tuesday, April 26, 2022 - 4:06:04 PM
Long-term archiving on: : Wednesday, January 5, 2022 - 6:50:17 PM
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Monday, October 4, 2021 - 3:50:05 PM
Last modification on : Tuesday, April 26, 2022 - 4:06:04 PM
Long-term archiving on: : Wednesday, January 5, 2022 - 6:50:17 PM
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UCPSS Abbas Salhab 2020.pdf
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