ACTIVE DAMPING OF ELECTRONIC MICRO COMPONENTS WITH PIEZOELECTRIC MEMS DEVICES

Yann Meyer (1) , Manuel Collet (1) , Patrick Delobelle (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Thick PZT films are of major interest in the actuation of mechanical structures. One of the main fields deals with active damping. Precisely, it's an opened field for the stabilization of electronic components sensitive to dynamical effects. Indeed, the oscillators used, for example, in the aircrafts, support some vibrations due to accelerations, which are able to have some disturbing effects on the frequential stability. In this context, MicroElectroMechanical Systems seem to be very interesting to create local structures capable of improving the damping behaviour of the micro components' support. They can effectively present a good opportunity in a large class of problems. The first studied micro controlling system was a clamped-clamped micro beam with two PZT actuators and one PVDF sensor. This simple system can be considered as a suspension element being able to support very light and sensitive systems like frequency generators or MEMS sensors. The obtained results suggest that this kind of systems can enhance the frequential stability of the studied micro components.

Domaines: Sciences de l'ingénieur [physics]

Yann Meyer, Manuel Collet, Patrick Delobelle. ACTIVE DAMPING OF ELECTRONIC MICRO COMPONENTS WITH PIEZOELECTRIC MEMS DEVICES. Cansmart Meeting International Workshop Smart Materials and Structures, Oct 2004, Montréal, Canada. pp.27. ⟨hal-03356068⟩