Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Materials Science and Engineering: A Année : 1999

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hal-03347252 , version 1 (17-09-2021)

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Christophe Poilâne, P. Delobelle, L. Bornier, P. Mounaix, X. Melique, et al.. Determination of the mechanical properties of thin polyimide films deposited on a GaAs substrate by bulging and nanoindentation tests. Materials Science and Engineering: A, 1999, 262 (1-2), pp.101-106. ⟨10.1016/S0921-5093(98)01002-8⟩. ⟨hal-03347252⟩
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