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Development of PZT-based 18 MHz 2D pMUT array with PDMS waveguide

Xu-Bo Wang 1 Le-Ming He 1 Wen-Juan Liu 1, 2, 3 Shu-Ren Song 1 Wei-Jiang Xu 2, 4 Qian Cheng Antoine Riaud 1 Jun-Yan Ren 1 Jia Zhou 1
3 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
4 TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN
IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
Abstract : For high-resolution ultrasonic imaging, an 18 MHz lead zirconate titanate (PZT) based two-dimensional (2D) piezoelectric micromachined ultrasonic transducers (pMUTs) array with polydimethylsiloxane (PDMS) waveguide are developed. The array is composed of 8 x 16 elements with a pitch of 75 mu m and each element can be independently electrically excited. The structure is fabricated by micromachining. The resonance frequency obtained in air is 18.3 MHz and 18 MHz with and without PDMS waveguide filling, respectively. The displacement responses show a sensitivity of 2.6 nm/V and a bandwidth of 14% with PDMS waveguide.
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https://hal.archives-ouvertes.fr/hal-03322798
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Submitted on : Thursday, August 19, 2021 - 6:01:52 PM
Last modification on : Wednesday, October 27, 2021 - 12:57:25 PM

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Xu-Bo Wang, Le-Ming He, Wen-Juan Liu, Shu-Ren Song, Wei-Jiang Xu, et al.. Development of PZT-based 18 MHz 2D pMUT array with PDMS waveguide. IEEE International Ultrasonics Symposium (IEEE IUS), Sep 2020, Las Vegas, United States. 4 p., ⟨10.1109/IUS46767.2020.9251633⟩. ⟨hal-03322798⟩

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