Development of PZT-based 18 MHz 2D pMUT array with PDMS waveguide

Xu-Bo Wang (1) , Le-Ming He (1) , Wen-Juan Liu (2, 3, 4) , Shu-Ren Song (1) , Wei-Jiang Xu (2, 5, 4, 6) , Qian Cheng , Antoine Riaud (1) , Jun-Yan Ren (1) , Jia Zhou (1)

1 Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
4 IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
5 TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN
6 INSA Hauts-De-France - INSA Institut National des Sciences Appliquées Hauts-de-France

For high-resolution ultrasonic imaging, an 18 MHz lead zirconate titanate (PZT) based two-dimensional (2D) piezoelectric micromachined ultrasonic transducers (pMUTs) array with polydimethylsiloxane (PDMS) waveguide are developed. The array is composed of 8 x 16 elements with a pitch of 75 mu m and each element can be independently electrically excited. The structure is fabricated by micromachining. The resonance frequency obtained in air is 18.3 MHz and 18 MHz with and without PDMS waveguide filling, respectively. The displacement responses show a sensitivity of 2.6 nm/V and a bandwidth of 14% with PDMS waveguide.

Mots clés: PZT; pMUTs; 2D array; PDMS waveguide

Domaines: Sciences de l'ingénieur [physics]; Informatique [cs]; Physique [physics]; Acoustique [physics.class-ph]; Matériaux; Micro et nanotechnologies/Microélectronique

Xu-Bo Wang, Le-Ming He, Wen-Juan Liu, Shu-Ren Song, Wei-Jiang Xu, et al.. Development of PZT-based 18 MHz 2D pMUT array with PDMS waveguide. IEEE International Ultrasonics Symposium 2020, IUS2020, Sep 2020, Las Vegas, United States. 4 p., ⟨10.1109/IUS46767.2020.9251633⟩. ⟨hal-03322798⟩