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Communication Dans Un Congrès Année : 2019

Micro-Electro-Mechanical-Systems advances for measurements at small scales: the vertical silicon probes technology extended to nearfield optics

Résumé

Instrumentation intending to go beyond the limits of current Atomic Force Microscope setups (AFM), and applications requiring AFM to be integrated in non-standards environmental conditions need sensors that overcome limitations given by available probes. We show that the vertical probe technology enabling AFM without laser is also applicable to scattering SNOM (Scanning Near Field Optical Microscopy).
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Dates et versions

hal-03321928 , version 1 (18-08-2021)

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B. Walter, E. Mairiaux, Sophie Eliet, Jean-Francois Lampin, Marc Faucher. Micro-Electro-Mechanical-Systems advances for measurements at small scales: the vertical silicon probes technology extended to nearfield optics. 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS 2019), Jul 2019, Helsinki, Finland. pp.1-5, ⟨10.1109/MARSS.2019.8860980⟩. ⟨hal-03321928⟩
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