Periodic Multilayer for X-ray Spectroscopy in the Li K Range

Vladimir Polkonikov (1) , Nikolai Chkhalo (1) , Roman Pleshkov (1) , Angelo Giglia (2) , Nicolas Rividi (3) , Emmanuelle Brackx (4) , Karine Le Guen (5) , Iyas Ismail (5) , Philippe Jonnard (5)

1 Institute for Physics of Microstructures, Russian Academy of Sciences, 603095 Nizhny Novgorod, GSP-105, Russia
2 Consiglio Nazionale delle Ricerche,
3 Plateforme Camparis - Plateforme analytique MEN (Microanalyses en sciences de l’Environnement) [Paris]
4 CEA-DES (ex-DEN) - CEA-Direction des Energies (ex-Direction de l'Energie Nucléaire)
5 LCPMR - Laboratoire de Chimie Physique - Matière et Rayonnement

X-ray spectroscopy of lithium is very difficult, even impossible, with wavelength dispersive spectrometers commonly deployed on scanning electron microscopes or electron microprobe analyzers. This is due to the absence of crystals and lack of efficient periodic multilayer for this spectral range, around 50 eV. To address this issue, we propose using a Be/Si/Al multilayer having a period of about 29 nm. The multilayer was deposited by magnetron sputtering and its reflectivity measured as a function of the glancing angle in the spectral range of the Li K emission and as a function of the incident energy up to ~200 eV. This characterization demonstrates that the designed multilayer is suitable to efficiently perform spectroscopy in the range of the Li K emission in terms of reflectance (0.32 at 51.5 eV), bandwidth (around 3.5 eV) and rejection of high order diffracted radiation.

Domaines: Autre [cond-mat.other]

Vladimir Polkonikov, Nikolai Chkhalo, Roman Pleshkov, Angelo Giglia, Nicolas Rividi, et al.. Periodic Multilayer for X-ray Spectroscopy in the Li K Range. Applied Sciences, 2021, 11 (14), pp.6385. ⟨10.3390/app11146385⟩. ⟨hal-03284367⟩