Synthesis of micro-nanostructured TiN thin film from a TiO2 sol–gel

Arnaud Valour (1) , Maria Alejandra Usuga Higuita (1, 2) , Nicolas Crespo-Monteiro (1) , Stéphanie Reynaud (1) , D. Jamon (1) , Marion Hochedel (1) , Christophe Donnet (1) , Yves Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique

Domaines: Sciences de l'ingénieur [physics]

Arnaud Valour, Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, Stéphanie Reynaud, D. Jamon, et al.. Synthesis of micro-nanostructured TiN thin film from a TiO2 sol–gel. 2nd Edition of World Nanotechnology Conference, Apr 2021, ORLANDO, United States. ⟨hal-03273606⟩