Combined scanning microwave and electron microscopy: a novel toolbox for hybrid nanoscale material analysis

Kamel Haddadi (1, 2) , O. C. Haenssler , K. Daffe (1) , S. Eliet (1, 3) , Christophe Boyaval (1, 4) , Didier Theron (1, 5) , Gilles Dambrine (1, 6)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN
3 PCMP - IEMN - Plateforme de Caractérisation Multi-Physiques - IEMN
4 CMNF - IEMN - Centrale de Micro Nano Fabrication - IEMN
5 NAM6 - IEMN - Nano and Microsystems - IEMN
6 ANODE - IEMN - Advanced NanOmeter DEvices - IEMN

A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nano-robotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into a high resolution scanning electron microscope (SEM). The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of material samples with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.

Domaines: Sciences de l'ingénieur [physics]

Kamel Haddadi, O. C. Haenssler, K. Daffe, S. Eliet, Christophe Boyaval, et al.. Combined scanning microwave and electron microscopy: a novel toolbox for hybrid nanoscale material analysis: [Invited]. IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes, IMWS-AMP 2017, Sep 2017, Pavia, Italy. 3 p., ⟨10.1109/IMWS-AMP.2017.8247419⟩. ⟨hal-03224651⟩