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WO3 processed by direct laser interference patterning for NO2 detection

Abstract : In this paper two kind of sensors based on WO3 sputtered by magnetron sputtering and annealed at 600 °C have been studied. The first kind was processed by two-dimensional direct laser interfering patterning (DLIP) and the second one without any additional treatment. Morphological and structural characterization have shown a hole structure in a periodic line-pattern for the DLIP-processed sensors and a flat surface for the only-annealed sensors, both with a tetragonal WO3 phase. TOF-SIMS analysis has revealed that the first WO3 layers are reduced for both samples, which could improve sensing performance. Promising response enhancement of DLIP-processed sensors has been observed for low concentrations of NO2 (from 0.5 ppm to 5 ppm) at 200 °C, lowering the limit of detection (LOD) to 10 ppb, half of the LOD of the only-annealed sensors (20 ppb). Cross sensitivity to CO and HCHO have been investigated and the sensing mechanisms discussed.
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Submitted on : Tuesday, May 4, 2021 - 2:38:49 PM
Last modification on : Tuesday, September 27, 2022 - 4:47:38 AM
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Laura Parellada-Monreal, Sandro Gherardi, Giulia Zonta, Cesare Malagù, Davide Casotti, et al.. WO3 processed by direct laser interference patterning for NO2 detection. Sensors and Actuators B: Chemical, Elsevier, 2020, 305, pp.127226. ⟨10.1016/j.snb.2019.127226⟩. ⟨hal-03216944⟩



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