Skip to Main content Skip to Navigation
Conference papers

H-infinity optimal control enabled micro-force sensing

Abstract : This paper describes a micro-force sensing device where a H-infinity control scheme is used to actively balance the external force and provide the measurement. The force sensing principle is based on the active control of the electrostatic bipolar actuator (comb-drive) within the sensor. An external load force acts on the sensor and displaces the probe. The controller is set to balance the applied force and keep the probe at its null position. As a result, the applied force is obtained in real time from the balancing control signal. A meso-scale prototype has been built as proof-of-concept and an especially designed H-infinity control allows for a measurement accuracy of 0.4 μN over a large range [-400+400] μN.
Document type :
Conference papers
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-03190976
Contributor : Sinan Haliyo Connect in order to contact the contributor
Submitted on : Wednesday, April 28, 2021 - 5:48:43 PM
Last modification on : Tuesday, November 16, 2021 - 5:25:31 AM
Long-term archiving on: : Thursday, July 29, 2021 - 7:11:37 PM

File

AMO2013.pdf
Files produced by the author(s)

Licence


Distributed under a Creative Commons Attribution 4.0 International License

Identifiers

Citation

Abdenbi Mohand Ousaid, Sinan Haliyo, Stephane Regnier, Vincent Hayward. H-infinity optimal control enabled micro-force sensing. 3d International Conference on Systems and Control (ICSC13), 2013, Alger, Algeria. pp.490-495, ⟨10.1109/ICoSC.2013.6750904⟩. ⟨hal-03190976⟩

Share

Metrics

Record views

45

Files downloads

84