A multifunctional standardized magnetic tunnel junction stack embedding sensor, memory and oscillator functionality

A. Chavent (1) , V. Iurchuk (1) , L. Tillie (1) , Y. Bel (1) , N. Lamard (1) , L. Vila (1) , U. Ebels (1) , Ricardo C. Sousa (1) , B. Dieny (1) , G. Di Pendina (1) , G. Prenat (1) , J. Langer (2) , J. Wrona (2) , I.L. Prejbeanu (1)

1 SPINTEC - SPINtronique et TEchnologie des Composants
2 Singulus technology AG

The objective of this study is to co-integrate multiple digital and analog functions together within CMOS by developing a universal magnetic tunneling junction stack (MTJ) capable of realizing logic, memory, and analog functions, within a single baseline technology. This will allow monolithic heterogeneous integration, fast and low-power processing, and high integration density, particularly useful for Internet of Things (IoT) platforms. This unique spintransfer-torque (STT) MTJ is called Multifunctional Standardized Stack (MSS). This paper presents the progress regarding memory, oscillator and sensor functionalities targeted for the technology. We show that a single magnetic stack deposition can be used to obtain these three functionalities on the same wafer.

Domaines: Matière Condensée [cond-mat]; Micro et nanotechnologies/Microélectronique

A. Chavent, V. Iurchuk, L. Tillie, Y. Bel, N. Lamard, et al.. A multifunctional standardized magnetic tunnel junction stack embedding sensor, memory and oscillator functionality. Journal of Magnetism and Magnetic Materials, 2020, 505, pp.166647. ⟨10.1016/j.jmmm.2020.166647⟩. ⟨hal-03111526⟩