Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform

Stephane Monfray (1) , Sébastien Cremer (1) , Nathalie Vulliet (1) , Emmanuel Dubois (2, 3) , Florian Domengie (1) , Sebastien Jan (1) , Francoise Baille (1) , Frederic Boeuf (1)

1 ST-CROLLES - STMicroelectronics [Crolles]
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 MICROELEC SI - IEMN - Microélectronique Silicium - IEMN

This paper highlights the optimization of Deep Rib High Speed Phase Modulators for 400G applications thanks to the optimal choice of structure and implants through a Design Of Experiment analysis, including the proposal of a new Deep Rib HSPM with Z-implants. Results show 1,6dB gain in OMA (Optical Modulation of Amplitude) at the same cutoff frequency (fc=[2Pi*RC]-1) compared to the previous generation [1] with optimized vertical implants, and up to 2,15dB gain vs [1] with the new Z-implant Deep Rib device.

Mots clés: Modulators; Silicon Doping; Silicon photonics; Photonics; Waveguides; Modulation; Germanium; Manufacturing

Domaines: Sciences de l'ingénieur [physics]

Stephane Monfray, Sébastien Cremer, Nathalie Vulliet, Emmanuel Dubois, Florian Domengie, et al.. Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform. SPIE Photonics Europe, Conference 11364 - Applications of Photonic Technology - Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, Apr 2020, Strasbourg, France. 1136403, 8 p., ⟨10.1117/12.2554725⟩. ⟨hal-03092725⟩