Characterization of transport of neutral and ionized species in reactive HiPIMS process

Dimitri Boivin (1) , Aymane Najah (1) , Stéphane Cuynet (1) , Cédric Noël (1) , Robert Hugon (1) , Thierry Belmonte (1) , Ludovic de Poucques (1)

1 IJL - Institut Jean Lamour

Domaines: Physique des plasmas [physics.plasm-ph]

Dimitri Boivin, Aymane Najah, Stéphane Cuynet, Cédric Noël, Robert Hugon, et al.. Characterization of transport of neutral and ionized species in reactive HiPIMS process. MSE 2020 – Materials Science and Engineering Congress, Sep 2020, Darmstadt, Germany. ⟨hal-03052100⟩