The critical role of N-vacancy on chemical composition fluctuations and degradation of InAlN layer

Ranim Mohamad , Marie Pierre Chauvat , Slawomir Kret , Piero Gamarra , Sylvain Delage , Viwanou Hounkpati , Cedric Lacam , Jun Chen , Pierre Ruterana (1)

1 CIMAP - UMR 6252 - Centre de recherche sur les Ions, les MAtériaux et la Photonique

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Ranim Mohamad, Marie Pierre Chauvat, Slawomir Kret, Piero Gamarra, Sylvain Delage, et al.. The critical role of N-vacancy on chemical composition fluctuations and degradation of InAlN layer. Journal of Applied Physics, 2019, 125 (21), pp.215707. ⟨10.1063/1.5088109⟩. ⟨hal-03047705⟩