Investigation of the limit operating temperature of LiNbO3 as substrate for SAW devices

Jordan Maufay (1, 2) , Thierry Aubert (1) , Ninel Kokanyan (1) , Cécile Floer (2) , Sami Hage-Ali (2) , Omar Elmazria (2)

1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes
2 IJL - Institut Jean Lamour

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Micro et nanotechnologies/Microélectronique

Jordan Maufay, Thierry Aubert, Ninel Kokanyan, Cécile Floer, Sami Hage-Ali, et al.. Investigation of the limit operating temperature of LiNbO3 as substrate for SAW devices. IEEE International Ultrasonics Symposium, Sep 2020, Las Vegas (Virtual), United States. ⟨hal-03029837⟩