Operation of near-field scanning millimeter-wave microscopy up to 67 GHz under scanning electron microscopy vision

P Polovodov (1) , Didier Theron (1, 2) , S. Eliet (1) , Vanessa Avramovic (1) , Christophe Boyaval (1, 3) , D. Deresmes (1, 4) , Gilles Dambrine (1, 5) , Kamel Haddadi (1, 6)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 NAM6 - IEMN - Nano and Microsystems - IEMN
3 CMNF - IEMN - Centrale de Micro Nano Fabrication - IEMN
4 PCMP - IEMN - Plateforme de Caractérisation Multi-Physiques - IEMN
5 ANODE - IEMN - Advanced NanOmeter DEvices - IEMN
6 CSAM - IEMN - Circuits Systèmes Applications des Micro-ondes - IEMN

A near-field scanning millimeter-wave microscope is developed with broadband capabilities up to 67 GHz. The instrumentation has been designed to operate inside a scanning electron microscope for environment control and water meniscus elimination. Scanning electron microscopy imaging of the tip / sample interaction gives the unique possibility to limit the scan area and preserve the integrity of the probe tip. In addition, hybrid imaging considering simultaneously atomic, microwave and electron microscopy tools is beneficial for further modeling to address the quantitative characterization of nanomaterials. Experimental data are exemplary shown to demonstrate the viability of the solution proposed.

Mots clés: RF nanotechnology; near-Field scanning microwave microscopy (NSMM); atomic force microscopy (AFM); scanning electron microscopy (SEM); millimeter-wave

Domaines: Sciences de l'ingénieur [physics]

P Polovodov, Didier Theron, S. Eliet, Vanessa Avramovic, Christophe Boyaval, et al.. Operation of near-field scanning millimeter-wave microscopy up to 67 GHz under scanning electron microscopy vision. IEEE MTT International Microwave Symposium, IMS 2020, Jun 2020, Los Angeles (On-line event), United States. pp.95-98, ⟨10.1109/IMS30576.2020.9224090⟩. ⟨hal-03022574⟩