Influence of sputtering conditions and annealing parameters on structure and morphology of NiTiO3 ilmenite thin films

Meriem Chettab (1) , Quentin Simon (1) , Mustapha Zaghrioui (1) , Cécile Autret-Lambert (1) , Patrick Laffez (1)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)

Domaines: Matériaux

Meriem Chettab, Quentin Simon, Mustapha Zaghrioui, Cécile Autret-Lambert, Patrick Laffez. Influence of sputtering conditions and annealing parameters on structure and morphology of NiTiO3 ilmenite thin films. Thin Solid Films, 2020, 714, pp.138384. ⟨10.1016/j.tsf.2020.138384⟩. ⟨hal-02964878⟩