STRUCTURAL AND CHEMICAL INVESTIGATION OF THERMALLY EVAPORATED Ti-Ni-Zr FILMS

Etude structurale et chimique de films Ti-Ni-Zr évaporés thermiquement

Valerie Brien (1, 2) , A. Dauscher (2) , Sébastien J. Weber (3) , J B Ledeuil , F. Machizaud (4)

1 IMN - Institut des Matériaux Jean Rouxel
2 IJL - Institut Jean Lamour
3 Drexel University
4 ENSMN - Ecole Nationale Supérieure des Mines de Nancy

The structure and chemical composition of Ti-Ni-Zr thin films grown by thermal evaporation were examined by grazing X-ray diffraction, transmission electron microscopy and secondary neutral mass spectroscopy. The influence of the deposition temperature and substrate nature was studied. Although small sizes of crystallites in the films (1-10 nm) made the analysis of the phases in present difficult because of the spreading of the diffraction peaks, the knowledge of the chemical composition of the films helped to conclude that strong depletion in Zr in the films was observed when the deposition temperature was high.

Domaines: Optique [physics.optics]; Chimie inorganique; Science des matériaux [cond-mat.mtrl-sci]; Matériaux

Valerie Brien, A. Dauscher, Sébastien J. Weber, J B Ledeuil, F. Machizaud. STRUCTURAL AND CHEMICAL INVESTIGATION OF THERMALLY EVAPORATED Ti-Ni-Zr FILMS. Bulgarian Journal of Physics, 2002, 29, pp.142 - 150. ⟨hal-02898244⟩