Spin coating and micro-patterning optimization of composite thin films based on PVDF

Anh Ngoc Nguyen (1) , Jeanne Solard (2) , Huyen Thi Thanh Nong (3) , Chirine Ben Osman (4) , Andrés Gómez (5) , Valérie Bockelée (6) , Sylvie Tencé-Girault (7) , Frederic Schoenstein (6) , Maite Simón-Sorbed (5) , Anna Esther Carrillo (5) , Silvana Mercone (6)

1 VAST - Vietnam Academy of Science and Technology
2 LPL - Laboratoire de Physique des Lasers
3 IJL - Institut Jean Lamour
4 Solvay (France)
5 ICMAB - Institut de Ciència de Materials de Barcelona
6 LSPM - Laboratoire des Sciences des Procédés et des Matériaux
7 PIMM - Laboratoire Procédés et Ingénierie en Mécanique et Matériaux

We optimize the elaboration of very thin film of poly(vinylidene fluoride) (PVDF) polymer presenting a well-controlled thickness, roughness, and nano-inclusions amount. We focused our effiort on the spin coating elaboration technique which is easy to transfer to an industrial process. We show that it is possible to obtain continuous and smooth thin films with mean thicknesses of 90 nm by properly adjusting the concentration and the viscosity of the PVDF solution as well as the spin rate and the substrate temperature of the elaboration process. The electro-active phase content versus the magnetic and structural properties of the composite films is reported and fully discussed. Last but not least, micro-patterning optical lithography combined with plasma etching has been used to obtain well-defined one-dimensional micro-stripes as well as squared-rings, demonstrating the easy-to-transfer silicon technology to polymer-based devices.

Mots clés: Spin coating; Magnetic nanoparticles * PVDF; Composite thin films

Domaines: Matériaux

Anh Ngoc Nguyen, Jeanne Solard, Huyen Thi Thanh Nong, Chirine Ben Osman, Andrés Gómez, et al.. Spin coating and micro-patterning optimization of composite thin films based on PVDF. Materials, 2020, 13 (6), pp.1-17. ⟨10.3390/ma13061342⟩. ⟨hal-02543501⟩