Enhanced performance of integrated silicon nanophotonic devices engineered with sub-wavelength grating structures

Daniel Benedikovic (1) , Mathias Berciano (1) , Alberto Carlos , Xavier Le Roux (2) , Sylvain Guerber (3) , Guillaume Marcaud (1) , Vladyslav Vakarin (2) , Diego Perez-Galacho (1) , Eric Cassan (2) , Delphine Marris-Morini (2) , Pavel Cheben (4) , Frédéric Boeuf (5) , Charles Baudot (5) , Laurent Vivien (2)

1 C2N - Centre de Nanosciences et de Nanotechnologies [Orsay]
2 IEF - Institut d'électronique fondamentale
3 C2N - Centre de Nanosciences et de Nanotechnologies [Marcoussis]
4 NRC - National Research Council of Canada
5 ST-CROLLES - STMicroelectronics [Crolles]

Sub-wavelength gratings, segmented resonant-less structures with geometries featuring scales considerably smaller than the wavelength of light, have enabled an attractive technological concept to locally control light guiding properties in planar silicon chip architectures. This concept has allowed for additional degrees of freedom to tailor effective mode index, modal confinement, waveguide dispersion, as well as anisotropy, thereby providing a vital route towards high performing devices with engineered optical properties. Sub-wavelength integrated nanophotonics has opened up new horizons for realization of key building components that afford outstanding device performances, typically beyond those achieved by conventional design strategies, yet favorably benefiting from the sub-100-nm pattern resolution of established semiconductor manufacturing tools in nanophotonic foundries. The distinctive features of sub-wavelength grating structures are considered essential for future generation of chip-scale applications in optical communications and interconnects, biomedicine, as well as quantum-based technologies. In this work, we report recent advances in the development of high-performance on-chip nanophotonic waveguides and devices engineered with the sub-wavelength grating metamaterial structures. In particular, we discuss recent achievements of low-loss waveguides with controlled chromatic dispersion, high-efficiency fiber-to-chip surface grating couplers, micro-ring resonators, and grating-assisted waveguide filters, implemented on the mature silicon-on-insulator technology.

Mots clés: Integrated optics; Silicon nanophotonics; Sub-wavelength grating metamaterials; Waveguide dispersion; Micro-ring resonators; Fiber-chip surface grating couplers; Waveguide-based grating filters

Domaines: Optique / photonique; Micro et nanotechnologies/Microélectronique

Daniel Benedikovic, Mathias Berciano, Alberto Carlos, Xavier Le Roux, Sylvain Guerber, et al.. Enhanced performance of integrated silicon nanophotonic devices engineered with sub-wavelength grating structures. SPIE Optics + Optoelectronics 2019 Integrated Optics: Design, Devices, Systems, and Applications V, Apr 2019, Prague, Czech Republic. ⟨10.1117/12.2520780⟩. ⟨hal-02539514⟩