Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose

Matthieu Denoual (1) , Mathieu Pouliquen (2) , Corentin Jorel (1) , Didier Robbes (1) , Julien Grand (3) , Maxime Debost (3) , Svetlana Mintova (3) , Maxime Harnois (4) , Olivier de Sagazan (5) , Shu Inoue (6) , Eric Lebrasseur (6) , Kentaro Yamada (6) , Yuki Okamoto (6) , Yoshio Mita (6)

1 Equipe Electronique - Laboratoire GREYC - UMR6072
2 LAC - Laboratoire d'automatique de Caen
3 LCS - Laboratoire catalyse et spectrochimie
4 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
5 IETR - Institut d'Électronique et des Technologies du numéRique
6 iSML - intelligente Semiconductor Microsystem Laboratory

In this paper, we show the integration steps we have undertaken for the integration of a recently proposed new principle for gas detection. Benefits of integration and co-integration of the miniaturized detectors with CMOS electronics will be the realization of arrays of selective detectors resulting in a new kind of electronic nose.

Mots clés: Gas detectors; Coatings; Micromechanical devices; Sensivity; Detectors; Metals; CMOS integrated circuits; Electronic noses; Mass measurement; Sensor arrays; Temperature measurement; Temperature sensors; Zeolites; Thermal gas detection; Electronic nose

Domaines: Science des matériaux [cond-mat.mtrl-sci]

Matthieu Denoual, Mathieu Pouliquen, Corentin Jorel, Didier Robbes, Julien Grand, et al.. Steps toward integration of zeolite-based thermal mass gas detectors to form electronic nose. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752802⟩. ⟨hal-02531336⟩