Screen Printed BaTiO 3 for CO 2 Gas Sensor

Fabien Le Pennec , Sandrine Bernardini (1) , Mohamad Hijazi (1) , Carine Perrin-Pellegrino (1) , Khalifa Aguir (1) , Marc Bendahan (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence

In this work, we report on a new evaluation of metal oxide based on carbon dioxide sensors, using barium titanate nano-powder. The sensing principle is based on a change in conductance of semiconducting oxides when carbon dioxide is present. The sensitive layer was deposited on a SiO 2 /Si substrate by screen printing technology. The sensor responses were studied between 100 and 5000 ppm of carbon dioxide in the air with 50% relative humidity. The sensor presents good sensitivity toward carbon dioxide, with a stable baseline, and fast response and recovery time. These results are promising for carbon dioxide sensing.

Mots clés: Gas Sensor; CO 2; BaTiO 3; Metal Oxide; Environment

Domaines: Micro et nanotechnologies/Microélectronique

Fabien Le Pennec, Sandrine Bernardini, Mohamad Hijazi, Carine Perrin-Pellegrino, Khalifa Aguir, et al.. Screen Printed BaTiO 3 for CO 2 Gas Sensor. The Fifth International Conference on Advances in Sensors, Actuators, Metering and Sensing, Nov 2020, Valencia, Spain. ⟨hal-02529671⟩