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Zero-Level Packaged RF-MEMS Switched Capacitors on Glass Substrates

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Journal articles
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https://hal.archives-ouvertes.fr/hal-02519280
Contributor : Pierre Blondy <>
Submitted on : Wednesday, March 25, 2020 - 8:56:09 PM
Last modification on : Thursday, March 26, 2020 - 1:59:25 AM

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Nesrine Belkadi, Kevin Nadaud, Clement Hallepee, Damien Passerieux, Pierre Blondy. Zero-Level Packaged RF-MEMS Switched Capacitors on Glass Substrates. Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2020, 29 (1), pp.109-116. ⟨10.1109/JMEMS.2019.2949949⟩. ⟨hal-02519280⟩

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