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Article Dans Une Revue Frontiers of Mechanical Engineering Année : 2020

Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT

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Micro et nanotechnologies/Microélectronique

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https://hal.science/hal-02505916

Soumis le : mercredi 11 mars 2020-21:13:50

Dernière modification le : samedi 1 juillet 2023-04:48:01

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hal-02505916 , version 1 (11-03-2020)

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Luis Iglesias, Priyadarshini Shanmugam, Jean-François Michaud, Daniel Alquier, Dominique Certon, et al.. Proof of concept and preliminary results of gas detection by measuring the admittance at the resonance and anti-resonance of an uncoated CMUT. Frontiers of Mechanical Engineering, 2020, ⟨10.3389/fmech.2020.00014⟩. ⟨hal-02505916⟩

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