Cold Chemical Lamination Tests of Grooved Internal Cavities in LTCC for Thermal Management

Malika Tlili (1) , Camilla Kärnfelt (2, 3) , Maïna Sinou (2, 3) , Alain Peden (4, 3)

1 Institut Mines-Télécom-Télécom Bretagne-UEB
2 IMT Atlantique - MO - Département Micro-Ondes
3 Lab-STICC_IMTA_MOM_DIM
4 MO - Département Micro-Ondes

This paper presents the fabrication of a micro heat pipe, in Low Temperature Cofired Ceramics (LTCC), as a cooling solution for electronic packaging. The micro heat pipe structure, produced using the ESL 41020 tape, is based on a grooved internal cavity, which ensures the process of cooling since it guarantees the evacuation of heat, by the use of working liquid. The manufacturing of the micro heat pipe with the standard LTCC fabrication process gives inflated cavities and deformed grooves. To improve this we make use of cold chemical lamination and test the cetyl alcohol as a sacrificial volume material, (SVM). The tests performed show that the cold chemical lamination did not improve the structure; neither did the cetyl alcohol with a hot lamination.

Mots clés: Micro heat pipe; Hot and cold lamination; SVM (sacrificial volume material); electronic packaging; ESL 41020

Domaines: Micro et nanotechnologies/Microélectronique

Malika Tlili, Camilla Kärnfelt, Maïna Sinou, Alain Peden. Cold Chemical Lamination Tests of Grooved Internal Cavities in LTCC for Thermal Management. IMAPS From Nano to Macro Power Electronics and Packaging European Workshop, Nov 2019, Tours, France. ⟨hal-02504765⟩