Quantifying eigenstrain distributions induced by focused ion beam damage in silicon

Alexander M Korsunsky (1) , Julien Guénolé (2) , Enrico Salvati , Tan Sui , Mahmoud Mousavi , Arun Prakash (3) , Erik Bitzek

1 Department of Engineering Science
2 Department of Materials Science and Engineering, Institute I, Friedrich-Alexander Universität Erlangen-Nürnberg (FAU)
3 Fraunhofer FOKUS - Fraunhofer Institute for Open Communication Systems

Domaines: Sciences de l'ingénieur [physics]

Alexander M Korsunsky, Julien Guénolé, Enrico Salvati, Tan Sui, Mahmoud Mousavi, et al.. Quantifying eigenstrain distributions induced by focused ion beam damage in silicon. Materials Letters, 2016, 185, pp.47-49. ⟨10.1016/j.matlet.2016.08.111⟩. ⟨hal-02459278⟩